ПРОБЛЕМЫ КОЛИЧЕСТВЕННОГО ПОСЛОЙНОГО АНАЛИЗА МОДИФИЦИРОВАННЫХ ПОВЕРХНОСТНЫХ СЛОЕВ И ЗАЩИТНЫХ ПОКРЫТИЙ НА ОСНОВЕ НИТРИДОВ, КАРБИДОВ И КАРБОНИТРИДОВ МЕТАЛЛОВ, ПРИМЕНЯЕМЫХ В ЭНЕРГЕТИКЕ

Abstract

Key problems are considered of quantitative layer-by-layer analysis of modified surface layers and protective coatings for improving operational characteristics of surfaces of power engineering equipment based on nitrides, carbides and carbonitrides of metals by the glow discharge spectroscopy method (C and N calibration, selection of measurement parameters, structure of sample surface). For coatings with different nitrogen and carbon contents, certification of their contents is performed by the X-ray photoelectron spectroscopy (XPS) method to be used for calibration of glow discharge spectrometers. Relationship is analyzed between parameters of the measurement conditions and the shape of craters for burning of different types of materials and coatings. Resolution of the glow discharge method in research of nanostructure coatings is considered.